Spatial resolution
Atom probe tomography APT
Article REF: P900 V2
Spatial resolution
Atom probe tomography APT

Authors : Didier BLAVETTE, François VURPILLOT, Bernard DECONIHOUT

Publication date: December 10, 2013 | Lire en français

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5. Spatial resolution

The spatial depth resolution of the atomic probe, limited in part by the shielding depth of the electric field, is less than 100 pm in pure metals

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