4. Glossary
PE ALD; plasma enhanced atomic layer deposition
Plasma-assisted atomic layer deposition.
CVD; chemical vapor deposition
Chemical vapor deposition.
OES; optical emission spectroscopy
Optical emission spectroscopy is used to identify radiatively de-excited species in plasma.
ICP; inductively coupled plasma
Reactor using an inductive source to create the plasma discharge.
TEM; transmission electron microscopy
Transmission electron microscopy (TEM) is a chemical characterization and imaging technique based on the passage of an electron beam through a thin sample.
XRD; X-Ray diffraction
X-ray diffraction is a method of analysis...
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Glossary
Bibliography
Websites
RAFALD (Réseau des Acteurs Français de l'ALD) : http://www.rafald.org
Cold Plasma Network: http: http://plasmasfroids.cnrs.fr
Société Française du Vide (SFV) : http://www.vide.org
...Events
Conferences :
Workshop RAFALD: http://www.rafald.org
AVS annual conference on ALD (in Dublin for 2016) : http://ald2016.com/
Directory
Manufacturers – Suppliers – Distributors (non-exhaustive list)
ALD equipment suppliers and distributors
Encapsulix : http://www.encapsulix.com/fr/
Altatech : http://www.altatech-sc.com/en/index.php
...
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