Downscaling effect

Consider a mechanical structure (see figure 2 ) consisting of two superimposed conductive electrodes, spaced at a distance d, of length L, width $\mathcal{l}$ and thickness h.

The upper ground electrode M is biased by a spring of stiffness k. This electrode can move in three dimensions.

We apply a force of modulus F _S perpendicular to the upper electrode, and measure the change in capacitance between the two electrodes induced by the displacement of the mass M.