1. Context

1.1 Transition from micro to nanotechnologies

Until recently, microtechnologies were simply a scientific curiosity for the most complex systems, or the prerogative of research laboratories for the most advanced structures. Recently, however, we have witnessed a change in industrial strategy in these areas. We are witnessing a growing appropriation of intellectual property by industrial partners of major French and international research laboratories: the world of industry is no longer hesitating to get involved in the development and design of new microsystem components....