3. Preamble: dimensional nanometrology
3.1 Units and SI
3.1.1 International system of units
Metrology is the science of measurement and its applications. It covers both the theoretical aspects of its description and the practical aspects of its experimental realization, whatever the measurement uncertainty and the field of application.
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Preamble: dimensional nanometrology
Metrological atomic force microscope
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Bibliography
- (1) - The Royal Society & The Royal Academy of Engineering - Nanoscience and nanotechnologies : opportunities and uncertainties - http://www.nanotec.org.uk/finalReport.htm (juillet 2004).
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