Conclusion

This article sets out the background to the birth of the concept of microsystems, or MEMS, with a few emblematic examples such as accelerometers, which can be found today in numerous applications (car airbags, cell phones).

We then set out the definitions and main operating principles for their design. The basic functions of sensors (micromechanical, chemical and biochemical, optical, magnetic, etc.) and actuators (electrostatic, piezoelectric, electromagnetic, etc.) are described.

We have also presented the manufacturing processes, in particular those specific to microsystems, right through to the packaging aspects. A number of non-exhaustive applications have been described throughout the article.

The MEMS boom is still very much a reality, and is based on technological developments coupled with advances in microelectronics,...