Definitions and operating principles

Microsystems, according to the European definition of the term, are intelligent miniaturized multifunctional devices. They combine mechanical, optical, electromagnetic, thermal and fluidic elements with electronics. They act as sensors, capable of identifying the physical parameters of their environment (pressure, acceleration, temperature, etc.) and/or as actuators, capable of acting on this environment.

Microsystems are usually divided into two categories:

• those that detect information, called sensors, collect local information such as mechanical, thermal, biological, chemical and optical information;

• those that can respond to the information,...