1. Microsystems by example
Microsystems are compact, miniaturized, multifunctional, collectively-manufactured devices that interact with the non-electrical world via sensors and actuators; they are able to exchange information and communication with the outside world or with other microsystems.
This definition, while perfectly correct, is too general to illustrate the reality. Two examples should be more explicit.
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In 1992, Analog Devices announced the launch of a fully integrated accelerometer on 10 mm 2 silicon for automotive shock detection. Figure 2 shows the corresponding integrated circuit. It is an exemplary microsystem, combining sensor,...
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Microsystems by example
Basic microsystem technologies
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Economic data
These data are taken from studies carried out by the European NEXUS organization (table 1 and table 2 ).
The total market today is worth 60 billion francs, and will be worth 240...
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