1. Context
1.1 Definitions and first examples
Microsystems are compact, miniaturized, multifunctional, collectively manufactured devices that interact with the surrounding world via sensors and actuators. They are also able to exchange information and communicate with the outside world or with other microsystems, thanks to coupled electronic and mechanical functionalities.
They were born in the late 1980s around the concept of a microbeam or vibrating diaphragm used as a sensor, for example in a magnetometer or pressure or acceleration sensor.
The microsystem concept quickly attracted a great deal of interest, particularly from two complementary perspectives:
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Context
Definitions and operating principles
Bibliography
Other general references on the subject of microsystems
Silicon Sensors; Middelhoek S., Audet S.A. (London Academic Press, 1989) – ISBN 10: 0124950515 / ISBN 13: 9780124950511.
Microsensors: Principles and Applications ; Gardner J.W. (Wiley, 1994) – ISBN 10 : 0471941360 / ISBN 13 : 9780471941361.
Semiconductor Sensors; Sze S.M. (Wiley, 1994) – ISBN: 978-0-471-54609-2.
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Directory
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Equipment manufacturers offer deep etching machines dedicated to microsystems:
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