3. Microsystems technologies

The "king" material of microsystems is silicon (Si), which we know for its semiconductor properties applied to microelectronics. It also possesses excellent mechanical properties and countless combination possibilities for optical, chemical or biochemical functions. What's more, silicon's crystalline nature ensures excellent reproducibility of component properties.

MEMS microsystems technology is heir to all the technologies developed for the production of electronic components, digital or analog integrated circuits and power devices. These technologies combine numerous successive operations of oxidation, implantation, diffusion, deposition or growth of thin films alternated with photolithography operations that determine the planar shapes of the various patterns. We present the key materials used in MEMS technologies, the basic and then specific processes (micromachining,...