Article | REF: E2000 V2

Thin film technology for RF filters

Authors: Ausrine BARTASYTE, Paul MURALT

Publication date: May 10, 2025 | Lire en français

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4. Environmental aspects

The substances and compounds AlN-ScN, LiNbO 3 , ZnO and KNbO 3 are not hazardous. They are non-flammable. They are not classified under GHS, and are not on the list of substances carcinogenic to humans.

KNbO 3 , ZnO and LiNbO 3 can cause irritation on contact with eyes and skin, and be harmful if swallowed or inhaled.

Potassium and lithium ions are not toxic. However, Li + overdosage (> 1.5 mmol · l –1 in plasma) can cause ataxia, tremors, renal failure, confusion, convulsions and dysarthria

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Environmental aspects