4. Glossary

MEB-FEG; secondary electron microscopy with field emission gun

An electron microscopy technique in which an electron beam is "reflected" from the surface of a sample. It can be used to visualize the surface of a sample on a micro- or even nanometric scale, and can be coupled with an EDXS chemical analysis system.

EDXS; Energy Dispersive X-ray Spectrometry

Semi-quantitative chemical analysis technique based on the detection of X-ray photons emitted by the interaction between an electron beam and the sample. The signal is analyzed in terms of energy dispersion.

MET; transmission electron microscopy

An electron microscopy technique in which an electron beam is "transmitted" through a very thin sample (a few tens of nanometers). There are two main modes of operation:...