Description

The simplest experimental set-up is shown in figure 1 . The material to be deposited is evaporated in the N pod, which is heated by the Joule effect. The substrates S are placed under the cathode electrode C, which is negatively polarized in relation to the rest of the grounded enclosure. The introduction of a gas raises the pressure in the chamber and initiates an electrical discharge between the substrate-carrying cathode and the rest of the chamber. For metal deposition, the gas used is argon. If a composite material is to be deposited, the gas(es) corresponding to the material is introduced.