Sputtering in a reactive atmosphere
Magnetron sputtering

Article REF: M1654 V1

Sputtering in a reactive atmosphere
Magnetron sputtering

Authors : Alain BILLARD, Frédéric PERRY

Publication date: December 10, 2005, Review date: June 4, 2024 | Lire en français

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2. Sputtering in a reactive atmosphere

Schematic representation of the different types of cracks obtained during a Vickers indentation test of a coating under high load. — Figure 15 - Schematic representation of the different...

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Bibliography

(1) - SIGMUND (P.) - Theory of sputtering. - – Phys. Rev., 184 (1969), 383.
(2) - HOFFMAN (D.W.), THORNTON (J.A.) - Internal stresses in sputtered chromium. - Thin Solid Films, 40 (1977), 355.

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