5. Conclusion – Outlook and expected developments
In recent years, glow discharge optical emission spectrometry has been uniquely positioned as a technique for rapid profiling of both thin and thick layers. The hoped-for developments could focus on improving sensitivity, and introducing non-intrusive sensors that would give more real-time information on the plasma, which changes with each layer traversed. These developments would then enable even more accurate interpretation of the results obtained.
Finally, the widespread use of numerical techniques for processing results, which are very common in other methods but still too little used in GDOES today, could further extend its field of application and naturally "force" it to meet new challenges.
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Conclusion – Outlook and expected developments
Glossary
Bibliography
Event
"GD day", international LDS conference, every two years (even-numbered years)
Standards and norms
- ISO Surface chemical analysis – Glow discharge optical emission spectrometry (GD-OES) – Introduction to use. - ISO 14707 -
- ISO Surface chemical analysis – Analysis of zinc and/or aluminium based metallic coatings by glow-discharge optical-emission spectrometry. - ISO 16962 -
Patents
Glow discharge spectrometric measurement of an organic or polymeric solid sample. EP 24434275A1.
Device example
Features of the Horiba Jobin-Yvon GD-Profiler 2 spectrometer
The device is built around a 47-channel simultaneous polychromator with a 2,400 tr/mm double-order concave holographic grating, 0.5 m focal length and 18 to 25 pm resolution in the 110 to 600 nm spectral range. In the UV, the elements measured are H (and D, deuterium, an isotope of H), O, C, N, Cl, Br, I.
The optical...
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