Elastic waves in thin films

Thin film technology for RF filters

Figure 1 - Symbol for a piezoelectric transducer and the Butterworth-Van Dyke equivalent circuit elements describing a resonance

Figure 2 - Characteristics of a micromachined piezoelectric ultrasonic transducer (pMUT), composed mainly of a Pb(Zr,Ti)O3 film deposited on a silicon membrane [4]

Figure 3 - Schematic operation of a ladder impedance element filter

Figure 4 - Frequency bands used by different generations of cell phones [6].

Figure 5 - Co-planar or microstrip line technology

Figure 6 - Different types of resonant modes in a plate with parallel electrodes. Polarization (polar axis) along the red (vertical) or yellow (in-plane) vector

Figure 7 - Schematic cross-section of a piezoelectric plate in thickness resonance mode (TFBAR)

Figure 8 - Guided pure shear wave dispersion curves as a function of (YXl)/90° LiNbO3 (YXl)/90° layer thickness on sapphire (propagation according to ...

Figure 9 - The two basic modes as examples of an antisymmetrical and symmetrical Lamb wave

Figure 10 - Lamb wave resonator [27]

Figure 11 - Geometric representations of permittivity, piezoelectricity, and elastic stiffness of LiNbO3 (LiTaO3), ZnO (AlN), and KNbO3

Figure 12 - Illustration of axis identification...

Figure 13 - Schematic illustration of polycrystalline, textured and epitaxial materials

Figure 14 - Coefficient variations...