3. Materials for microfluidics
In this section, we present the materials currently most widely used in the manufacture of microfluidic devices, namely polymer materials and glass. Their main advantages, characteristics and limitations will be described, and we will focus more specifically on processes for sealing microfluidic chips, and in particular a low-temperature glass sealing process.
3.1 Polymer materials
Polymeric materials used in the manufacture of microfluidic devices can be divided into four categories:
elastomers such as PDMS;
photosensitive resins such as SU-8 ;
Thermoplastics such as PMMA, COC, COP, PS, PEEK ;
paper.
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Materials for microfluidics
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