4. Glossary
MEB-FEG; secondary electron microscopy with field emission gun
An electron microscopy technique in which an electron beam is "reflected" from the surface of a sample. It can be used to visualize the surface of a sample on a micro- or even nanometric scale, and can be coupled with an EDXS chemical analysis system.
EDXS; Energy Dispersive X-ray Spectrometry
Semi-quantitative chemical analysis technique based on the detection of X-ray photons emitted by the interaction between an electron beam and the sample. The signal is analyzed in terms of energy dispersion.
MET; transmission electron microscopy
An electron microscopy technique in which an electron beam is "transmitted" through a very thin sample (a few tens of nanometers). There are two main modes of operation:...
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