1. Instrumentation

Ion beam analysis methods are based on the use of low-energy charged particle gas pedals. These small gas pedals produce light ions ( ¹ H ⁺ , ² D ⁺ , ³ He ⁺ , ⁴ He ⁺ ...) accelerated to energies of between 250 keV and 5 MeV. The interaction between the ions and the target to be analyzed generally takes place in a vacuum analysis chamber, although some devices allow analysis in air. The emitted X-rays are then detected and analyzed according to the principles of conventional X-ray spectrometry [109]...