6. Conclusion

Orientation microscopy is constantly evolving, with an ever-expanding field of possibilities for all characterizations exploiting electron diffraction in a SEM, whether with high angular resolution EBSD and cross-correlation, 3D EBSD, TKD (Transmission Kikuchi Diffraction), STEM in SEM (Scanning Transmission Electron Microscopy in SEM) and A-ECCI (Accurate Electron Channeling Contrast Imaging). ECCI in particular, after many years without any real progress, mainly due to the meteoric development of the EBSD technique, which is fully automated and more practical to implement, is making a strong comeback with the development of electron columns (high-brightness sources with intense, fine, quasi-parallel electron beams) and much higher-performance electron detectors.

The successful installation of a Rocking Beam mode on a modern electron column (GEMINI from Zeiss)...