ECCI principles and issues
Electron Channelling Contrast Imaging Technique (ECCI) and crystalline defects
Article REF: M4145 V1
ECCI principles and issues
Electron Channelling Contrast Imaging Technique (ECCI) and crystalline defects

Author : Nabila MALOUFI

Publication date: December 10, 2021 | Lire en français

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1. ECCI principles and issues

The technique of Electron Channelling Contrast Imaging (ECCI) was developed in 1967, following Coates' chance observation of an unexpected back-scattered electron (BSE) contrast produced by a thick, single-crystal sample of gallium arsenide GaAs analyzed in a scanning electron microscope (SEM). . The BSE micrograph shown in figure 1 was produced at very low magnification.

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