A reminder of electron-matter interactions
Scanning electron microscopy - Principles and equipment
Article REF: P865 V4
A reminder of electron-matter interactions
Scanning electron microscopy - Principles and equipment

Authors : François Brisset, Jacky Ruste

Publication date: September 10, 2024 | Lire en français

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2. A reminder of electron-matter interactions

2.1 Electron-matter interactions

When an electron beam of E0 penetrates a solid sample, it undergoes a number of interactions, both elastic and inelastic:

  • inelastic interactions cause a progressive loss of its energy :

    • in part, by transferring electrons from atomic orbitals,

    • to a lesser extent, by radiative loss;

  • elastic interactions, mainly with the nucleus, induce more or less abrupt variations in the direction of incident electrons. The result of these interactions is an "electron trajectory"...

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