4. New developments in scanning electron microscopy
In recent years, steady progress has been made in the design and manufacture of scanning electron microscopes:
to improve spatial resolution by reducing electron lens aberrations, improving detector efficiency and enhancing electron gun brilliance while reducing costs;
to adapt its use to the electronic components industry: appropriate "object" chambers, optimized low-voltage operation;
to facilitate management through computerization;
to integrate the digitization of acquired images right from the design stage.
More recently, new applications have been developed using special equipment:
automatic, methodical use of electron backscatter diffraction (EBSD);...
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New developments in scanning electron microscopy
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