2. Spatial resolution and depth of field
2.1 Separating power
The main image is associated with the secondary electrons.
The separating powerp, which characterizes the lateral spatial resolution d, is the smallest distance on the object whose conjugate points on the image are distinct. Two points on the image are only truly distinct if the zones of emergence of the collected secondary electrons associated with each point are also effectively distinct, and if the relative contrast is sufficient.
To optimize the separating power, it is therefore necessary to :
reduce the diameter of the incident electron brush (also known as the spot or electron probe diameter);
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Spatial resolution and depth of field
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