4. Conclusion

Techniques using X-ray fluorescence for quantification are now widespread, and offer a number of advantages, including non-destructive analysis. While sample preparation can be minimal, ideally none at all is required. However, until now, this has been at the cost of greater uncertainty about the result.

Reference-free quantification has been applied to the analysis of nanometric thin films by combining X-ray reflectivity and the X-ray fluorescence emitted by the elements present in the thin films. The main obstacles to the spread of this method still lie in the limited energy choices of laboratory X-ray sources, and in the expert nature of the analysis.

Competing techniques more familiar to users (XPS, SIMS, Ellipsometry, LIBS) provide comparable services, while sometimes being easier to use. It will take some time and a relevant application...