3. Applications in thin-film metrology

Grazing incidence measurements using X-rays enable us to probe very small material thicknesses, of the order of nanometers or less, thanks to the optical properties of photon radiation at these energies. In fact, in the X-ray energy range, optical indices, $n$ elements are written $n = 1 – δ – i β$ with $δ > 0$ ...

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Applications in thin-film metrology

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Bibliography

(1) - BECKHOFF (B.) - Reference-free X-ray spectrometry based on metrology using synchrotron radiation. - Dans Journal of Analytical Atomic Spectrometry, 23: 845 (2008).
(2) - SHERMAN (J.) - The theoretical derivation of fluorescent X-ray intensities from...

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