Article | REF: R6747 V1

Reference-free XRR-GIXRF combined analysis for thin layers

Author: Yves MÉNESGUEN

Publication date: September 10, 2025 | Lire en français

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    3. Applications in thin-film metrology

    Grazing incidence measurements using X-rays enable us to probe very small material thicknesses, of the order of nanometers or less, thanks to the optical properties of photon radiation at these energies. In fact, in the X-ray energy range, optical indices, n elements are written n=1δiβ with δ>0...

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    Applications in thin-film metrology