6. Hybrid metrology combining AFM and SEM measurements
6.1 The benefits of this new approach
This new approach, known as "hybrid metrology", enables us to measure the dimensional properties of a nanoparticle population in all three spatial dimensions by combining two complementary techniques: scanning electron microscopy (SEM) and atomic force microscopy (AFM).
6.2 Comparison of AFM and SEM measurement results on a nanosilica population
A suspension of ERM®-FD304 silica was deposited on the repositioning system following the protocol detailed in...
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Hybrid metrology combining AFM and SEM measurements
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"Mechanical and dimensional measurements"
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