Hybrid metrology combining AFM and SEM measurements
Hybrid AFM/SEM metrology for measuring nanoparticle dimensions
Article REF: R6737 V1
Hybrid metrology combining AFM and SEM measurements
Hybrid AFM/SEM metrology for measuring nanoparticle dimensions

Authors : Loïc CROUZIER, Nicolas FELTIN, Alexandra DELVALLÉE

Publication date: December 10, 2020 | Lire en français

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6. Hybrid metrology combining AFM and SEM measurements

6.1 The benefits of this new approach

This new approach, known as "hybrid metrology", enables us to measure the dimensional properties of a nanoparticle population in all three spatial dimensions by combining two complementary techniques: scanning electron microscopy (SEM) and atomic force microscopy (AFM).

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6.2 Comparison of AFM and SEM measurement results on a nanosilica population

A suspension of ERM®-FD304 silica was deposited on the repositioning system following the protocol detailed in section...

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