Techniques for measuring nano-object size
Hybrid AFM/SEM metrology for measuring nanoparticle dimensions
Article REF: R6737 V1
Techniques for measuring nano-object size
Hybrid AFM/SEM metrology for measuring nanoparticle dimensions

Authors : Loïc CROUZIER, Nicolas FELTIN, Alexandra DELVALLÉE

Publication date: December 10, 2020 | Lire en français

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2. Techniques for measuring nano-object size

2.1 Direct methods

Microscopy techniques such as atomic force microscopy (AFM), scanning electron microscopy (SEM) or transmission electron microscopy (TEM) are the only so-called "direct" techniques, since the measurement principle is based on direct observation of the nanoparticle, and the measurement produced is a "geometric" size directly traceable to the unit of length, the meter. The notion of traceability will be defined in the 3.3

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