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Article | REF: R6737 V1

Hybrid AFM/SEM metrology for measuring nanoparticle dimensions

Authors: Loïc CROUZIER, Nicolas FELTIN, Alexandra DELVALLÉE

Publication date: December 10, 2020 | Lire en français

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    4. Size measurement by scanning electron microscopy (SEM)

    4.1 Principle of SEM measurement

    In Scanning Electron Microscopy (SEM), a focused electron beam "illuminates" the sample locally and scans its surface line by line . The interaction between the incident beam and the atoms making up the sample produces several types of signal: secondary electrons, backscattered electrons, Auger electrons or X-rays. Different types of detectors can then be used to collect the various signals...

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