Size measurement by scanning electron microscopy (SEM)
Hybrid AFM/SEM metrology for measuring nanoparticle dimensions
Article REF: R6737 V1
Size measurement by scanning electron microscopy (SEM)
Hybrid AFM/SEM metrology for measuring nanoparticle dimensions

Authors : Loïc CROUZIER, Nicolas FELTIN, Alexandra DELVALLÉE

Publication date: December 10, 2020 | Lire en français

Logo Techniques de l'Ingenieur You do not have access to this resource.
Request your free trial access! Free trial

Already subscribed?

4. Size measurement by scanning electron microscopy (SEM)

4.1 Principle of SEM measurement

In Scanning Electron Microscopy (SEM), a focused electron beam "illuminates" the sample locally and scans its surface line by line . The interaction between the incident beam and the atoms making up the sample produces several types of signal: secondary electrons, backscattered electrons, Auger electrons or X-rays. Different types of detectors can then be used to collect the various signals...

You do not have access to this resource.
Logo Techniques de l'Ingenieur

Exclusive to subscribers. 97% yet to be discovered!

You do not have access to this resource. Click here to request your free trial access!

Already subscribed?

Ongoing reading
Size measurement by scanning electron microscopy (SEM)

Article included in this offer

"Mechanical and dimensional measurements"

( 121 articles )

Complete knowledge base

Updated and enriched with articles validated by our scientific committees

Services

A set of exclusive tools to complement the resources

View offer details
Contact our team FAQ