Conclusion
MEMS sensors - measurement techniques

Article REF: R431 V1

Conclusion
MEMS sensors - measurement techniques

Authors : Gilles Amendola, Patrick Poulichet, Laure Sevely, Laurie Valbin

Publication date: September 10, 2011 | Lire en français

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4. Conclusion

In this chapter, we have described the methods used by acceleration, rotation, pressure, acoustic, chemical and magnetic sensors. We have also detailed a few examples of industrial applications (marketed before 2010), giving the main characteristics of the sensors. In order to paint a picture of the next few years, research work and prospects for microsensors have been presented.

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Bibliography

(1) - LIU (K.), ZHANG (W.), CHEN (W.), LI (K.), DAI (F.), CUI (F.), WU (X.), MA (G.), XIAO (Q.) - The development of micro-gyroscope technology - Journal of Micromechanics and Microengineering – Volume 19(1), Pages 1-29 (2009).
(2) - EATONY (W.P.), SMITH (J.H.) -...

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