MEMS sensors - measurement techniques

After the first article ( [R 430] ) describes the manufacturing technologies, the main effects encountered and the associated electronic processing, the aim of this 2nd article is to describe the techniques used and their industrial (or experimental) realization for the main types of measurement. The methods used to measure pressure, acceleration, angular velocity, current, chemical agent detection, etc. will be developed.

For readers who haven't read [R 430] , we define "microsystems" as microtechnology-based systems that combine mechanical, electrical, optical, chemical and other principles with processing electronics. The term "MEMS" is used for microsystems based on electrical and mechanical principles, and microsensors (or MEMS sensors) are microsystems dedicated to the detection or measurement of physical quantities.