3. ALD applications for SOFC and PCFC materials
3.1 ALD for SOFC materials
In the case of SOFCs, several functionalities can benefit from the contribution of ALD.
SCROLL TO TOP3.1.1 Electrolytes and interfaces
Although the ultra-thin films of pure electrolytes (< 500 nm), manufactured by ALD, are primarily intended for µ-SOFCs, the interest of ALD is much broader if we consider the reactivities at interfaces aspects. The electrolytes considered are YSZ, doped cerium oxide and LaGaO 3 .
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ALD applications for SOFC and PCFC materials
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