4. Conclusion

Through selected examples, the potential of the ALD technique for sensor applications was highlighted. While ultra-thin flat films have been studied for gas detection, the development of nanostructures and the formation of heterojunctions by ALD demonstrate the benefits of this deposition technique compared with more conventional methods. In fact, it allows very precise control not only of thickness, but also of the composition, morphology and structuring of the coating. This enables fundamental studies of the phenomena and mechanisms involved in the detection process.

Precise thickness control combined with the uniformity of ALD layers opens up new approaches to nanopore and membrane design. Controlling pore diameter, geometry and chemical interactions with surface species enables them to be optimized for different applications. Examples of the use of ALD to control...