5. Application examples
The flexibility of the ALD technique and its applicability to a large number of substrate types has led to a wide variety of ALD reactors, suitable for deposition on substrates with a wide range of sizes and shapes.
In the laboratory environment, where small samples with centimeter-scale dimensions need to be processed, user-built machines or simple commercial R&D machines are used (see for example ). A recent development is the use of...
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
Application examples
Conclusion
Article included in this offer
"Technological innovations"
(
190 articles
)
Updated and enriched with articles validated by our scientific committees
A set of exclusive tools to complement the resources
Bibliography
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
