2. Performance metrics

2.1 Physico-chemical properties of coatings and precursor chemistry

The first factor to consider is the choice of precursors and the range of deposition temperatures that are targeted. Most modern reactors can handle a large number of precursor chemistry compositions. The use of a certain chemistry can, however, have an impact on the details of reactor implementation. For example, the use of halogen precursors (e.g. TiCl ₄ ) can generate reactive corrosion products (e.g. HCl) that can attack certain reactor materials (e.g. aluminum walls)...