3. Using thermodynamic data
The contribution of thermodynamic simulations to ALD and CVD processes is twofold: precursor selection and optimization of processing conditions . Clearly, before a finely-tuned product can be obtained, meeting a defined functional specification, the following successive questions must be answered:
what type, composition, quantity...
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
Using thermodynamic data
Conclusion
Article included in this offer
"Technological innovations"
(
190 articles
)
Updated and enriched with articles validated by our scientific committees
A set of exclusive tools to complement the resources
Bibliography
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
