Research and innovation | REF: RE252 V1

Thermodynamic Evaluation of ALD Precursors

Authors: Ioana NUTA, Elisabeth BLANQUET

Publication date: November 10, 2016 | Lire en français

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    1. Thermodynamic properties of the gas phase

    The gaseous state is characterized by a low atomic or molecular density (of the order of 2 x 10 25 atoms per cubic meter, whereas in the condensed phase – solid or liquid- it is of the order of 6 x 10 28 atoms per cubic meter) under normal pressure and temperature conditions (P = 1 bar and T = 25°C) . In a gas, the average distance covered by a particle moving between two successive impacts (collisions) is around ten times greater than the size of the molecules. A gas is generally composed of atoms with...

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