Using thermodynamic data
Thermodynamic Evaluation of ALD Precursors
Research and innovation REF: RE252 V1
Using thermodynamic data
Thermodynamic Evaluation of ALD Precursors

Authors : Ioana NUTA, Elisabeth BLANQUET

Publication date: November 10, 2016 | Lire en français

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3. Using thermodynamic data

The contribution of thermodynamic simulations to ALD and CVD processes is twofold: precursor selection and optimization of processing conditions . Clearly, before a finely-tuned product can be obtained, meeting a defined functional specification, the following successive questions must be answered:

  • what type, composition, quantity...

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