2. ALD: Principles, Characteristics, Applications, and Challenges for PV
ALD, through its clean growth mechanism (sequential, self-limiting surface chemical reactions), enables the deposition of thin films with unique properties (atomic-scale control of film composition and thickness, conformal and uniform) at low temperatures over large areas (on the order of square meters). As a result, ALD-deposited functional materials have a wide range of applications in both laboratory settings and the PV industry.
Here we highlight a few key aspects of ALD growth and the resulting films, which are discussed in greater detail in other articles.
ALD is a versatile process that enables the deposition of conformal thin films, even on substrates with high aspect ratios...
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ALD: Principles, Characteristics, Applications, and Challenges for PV