6. Glossary

Physical vapor deposition

A process in which a material is physically vaporized (by heating or ion bombardment) in a vacuum, then condenses onto a surface to form a thin film.

Magnetron; Magnetron

A device that uses a magnetic field combined with an electric field to trap electrons near the surface of the target (cathode), thereby increasing plasma density and improving sputtering efficiency.

Self-sputtering

A fraction of the atoms ejected from the target can be ionized in the ionization region, close to the cathode. These ions, under the effect of the electric field, can then be attracted back to the cathode and actively participate in the sputtering process, in a mechanism known as self-sputtering.

Erosion track; Racetrack

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