Importance of the magnetic field in a magnetron sputtering process
High Power Impulse Magnetron Sputtering
Article REF: IN207 V2
Importance of the magnetic field in a magnetron sputtering process
High Power Impulse Magnetron Sputtering

Author : Matthieu MICHIELS

Publication date: October 10, 2025 | Lire en français

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3. Importance of the magnetic field in a magnetron sputtering process

3.1 Presentation of two magnetron configurations

Although briefly mentioned in § 1.1 , the use of a magnetic field is essential for maintaining the discharge at lower working pressures. The configuration of the magnets, in terms of number, size, spacing, and...

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