4. Size measurement by scanning electron microscopy (SEM)
4.1 Principle of SEM measurement
In Scanning Electron Microscopy (SEM), a focused electron beam "illuminates" the sample locally and scans its surface line by line . The interaction between the incident beam and the atoms making up the sample produces several types of signal: secondary electrons, backscattered electrons, Auger electrons or X-rays. Different types of detectors can then be used to collect the various signals...
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Size measurement by scanning electron microscopy (SEM)
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