4. Manufacture of nanostructures using the photolithography technique

On photolithography:

Surface wave filters [E 2 200] by P. Defranould and P. Wright

Near-field optical microscopy [P 862] by D. Van Labeke

In the absence of intelligent machines, as nature does, that...

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Manufacture of nanostructures using the photolithography technique

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Bibliography

(1) - MEINDL (D.), CHEN (Q.), DAVIS (A.) - Limits on silicon nanoelectronics for terascale integration. - A computer science odyssey, Science, vol. 293 ; n° 5537 ; p. de 2044 à 2049 (2001).
(2) - DANKER (G.), PIERRE-LOUIS (O.), KASSNER (K.), MISBAH (C.) -...

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