9. Glossary – definitions

CVD/DCPV; Chemical Vapor Deposition.

A process for producing solids by gas-solid reaction using a precursor gas and a solid substrate at a sufficiently high temperature. The many variants of CVD include :

• PECVD: Plasma-Enhanced CVD; the gas phase is replaced by a plasma phase, which greatly reduces the working temperature;

• LCVD: Laser-CVD; the energy input is localized by the laser, making it possible to localize deposits for rapid prototyping (3D printing), for example;

• FBCVD: Fluidized-Bed CVD: the substrate is a powder, stirred by circulating gas to prevent agglomeration;

• CVI: Chemical Vapor Infiltration; the substrate is porous, and deposition takes place at depth in this pore space;

• ...