Soft (nano)structuring of surfaces
Article REF: NM545 V1

Soft (nano)structuring of surfaces

Authors : Philippe LECLERE, Pascal VIVILLE, Roberto LAZZARONI

Publication date: January 10, 2005 | Lire en français

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AUTHORS

  • Philippe LECLERE

  • Pascal VIVILLE

  • Roberto LAZZARONI

 INTRODUCTION

The race to miniaturize electronic devices has been underway for some time now. In the near future, the limits of the technologies currently used to manufacture integrated circuits using conventional lithography will be reached. This article presents some interesting ideas for overcoming these limits.

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Soft (nano)structuring of surfaces

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