6. Glossary

coplanar line; coplanar wave guide

Line made up of three metal strips placed in the same plane, with the central conductor carrying the microwave signal. The two lateral ribbons act as ground planes, separated from the signal by coplanar slots.

microstrip line; microstrip wave guide

Line made up of a conductive ribbon placed on one side of a dielectric material, the other side of which forms a ground plane.

monolithic microwave integrated circuit or MMIC

A type of integrated circuit operating at microwave radio frequencies (from 300MHz to 300GHz).

lithographie optique ; optical lithography

The photolithography process begins with the application of a photoresist, which is then exposed to light radiation. During this...