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Article | REF: E3093 V1

Microelectronic sensors

Authors: Alfred PERMUY, Éric DONZIER, Fadhel REZGUI

Publication date: May 10, 2004, Review date: November 29, 2019 | Lire en français

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    1. Microelectronics materials

    The interest of microelectronics in sensor technology lies above all in the exploitation of associated processes and equipment. Obviously, the use of these techniques requires compatibility both in terms of the shapes of the parts to be processed (flat substrate of calibrated thickness in the shape of a disk, etc.) and in terms of the materials used. Whenever possible, we use materials already known and mastered in the semiconductor industry. As far as thin films are concerned, mechanical and electrical properties are often highly dependent on the deposition process and subsequent heat treatment.

    1.1 Silicon

    Silicon is the basic material of the microelectronics industry. While its electronic properties have long been known and exploited in the manufacture of...

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