3. Resonator sizing
In practice, a volume wave resonator does not consist of a single piezoelectric layer with infinitely fine metallizations. As shown in figure 10 , it is supplemented by metal electrodes of finite thickness, environmental protection coatings, and a whole range of additional layers designed to individualize the frequencies of certain resonators in relation to others. In addition, since the resonator must be acoustically isolated from the substrate on which it is produced, specific structures are formed for this purpose. This makes it possible to distinguish between two types of bulk wave resonator: membrane resonators (called Film Bulk Acoustic Resonator, or FBAR) (figure
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Resonator sizing
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Bibliography
Standards and norms
- Standard on Piezoelectricity. - 176-ANSI/IEEE - 1987
Patents
L. Espenschied – Electrical wave filter US 1795204 (1931).
T. Inoe, Y. Myasaka – Piezoelectric composite thin film resonator US 4456850 (1982).
R.C. Ruby, P.P. Merchant – Method of making tunable thin film acoustic resonators US 5873153 (1993).
L. N. Dworsky, L. C. B. Mang – Frequency selective component and method EP 609555 (1993).
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