7. Glossary

bulk acoustic wave resonator (BAW)

Electromechanical resonator based on the resonance of a thickness mode of a piezoelectric plate.

film bulk acoustic wave resonator (FBAR)

Volume-elastic wave resonator isolated from its manufacturing substrate by positioning it on a membrane suspended above an air or vacuum cavity.

solidly mounted resonator (SMR); volume elastic wave resonator solidly mounted on the substrate

Volume-elastic wave resonator isolated from its manufacturing substrate by inserting an acoustic reflector between the resonator and the substrate.

Christoffel equation

Equation for calculating the phase velocities and polarizations of monochromatic elastic plane waves propagating in a given direction in a piezoelectric...